@conference {4127,
	title = {Design of Setup for Laser Induced Plasma Etching},
	booktitle = {2024 37th International Vacuum Nanoelectronics Conference (IVNC)},
	year = {2024},
	keywords = {AF, MF},
	doi = {10.1109/IVNC63480.2024.10652276},
	author = {Silhan, Lukas and Novotny, Jan and Plichta, Tom{\'a}{\v s} and Je{\v z}ek, Jan and Vaculik, Ondrej and {\v S}er{\'y}, Mojm{\'\i}r}
}
