The aim of the submitted project is the study of the electron optical properties of detection systém in a low energy scanning electron microscope consisting of a Wien filter and an electrostatic transport optics. The project involves both theoretical and experimental investigation of the behavior of the Wien filter. We will perform accurate computations of electron optical properties and aberrations for primary and signal beams, and we will study the behavior of the signal beam on passing throu gh an electrostatic transport optics in order to characterize their effect on angular and energy distribution of electrons in the signal beam. The measurement of the optical properties of the detector arrangement will be performed in an UHV system with a point electron projection.

Principal investigator: