The main goal of the project is to develop a new instrument that combines improved TOF-SIMS with a high resolution UHV-SFM. 3D-Nanochemiscope aims to offer complementary information of surface chemistry and morphology with about 10-nm lateral and 1-nm depth resolution, offering the possibility to reconstruct the real 3-D chemical structure. The lateral resolution of ToF-SIMS will be improved by the development of a new bismuth liquid metal cluster ion gun (Bi LMIG), while the development of a new Time-of-Flight analyser will enable a sensitivity increase. Additionally, a new metrological UHV-SFM with high precision flexure stage scanner and high precision xyz-stage will be developed and commercialised by NANOSCAN.
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