{\rtf1\ansi\deff0\deftab360

{\fonttbl
{\f0\fswiss\fcharset0 Arial}
{\f1\froman\fcharset0 Times New Roman}
{\f2\fswiss\fcharset0 Verdana}
{\f3\froman\fcharset2 Symbol}
}

{\colortbl;
\red0\green0\blue0;
}

{\info
{\author Biblio 7.x}{\operator }{\title Biblio RTF Export}}

\f1\fs24
\paperw11907\paperh16839
\pgncont\pgndec\pgnstarts1\pgnrestart
Oxidation resistance of organosilicon layered nanostructures synthesized by nonthermal plasma and plasma silica as a source of oxidizing agent. Applied Surface Science, 164972 (2026202620262026).\par \par Stable a-CSi:H films with a wide range of modulus of elasticity and low internal stress. Surface and Coatings Technology, 459, 129147 (2023202320232023).\par \par Surface topography affects the nanoindentation data. Thin Solid Films, 745, 139105 (2022202220222022).\par \par }