<?xml version="1.0" encoding="UTF-8"?><xml><records><record><source-app name="Biblio" version="7.x">Drupal-Biblio</source-app><ref-type>47</ref-type><contributors><authors><author><style face="normal" font="default" size="100%">Silhan, Lukas</style></author><author><style face="normal" font="default" size="100%">Novotny, Jan</style></author><author><style face="normal" font="default" size="100%">Plichta, Tomáš</style></author><author><style face="normal" font="default" size="100%">Ježek, Jan</style></author><author><style face="normal" font="default" size="100%">Vaculik, Ondrej</style></author><author><style face="normal" font="default" size="100%">Šerý, Mojmír</style></author></authors></contributors><titles><title><style face="normal" font="default" size="100%">Design of Setup for Laser Induced Plasma Etching</style></title><secondary-title><style face="normal" font="default" size="100%">2024 37th International Vacuum Nanoelectronics Conference (IVNC)</style></secondary-title></titles><keywords><keyword><style  face="normal" font="default" size="100%">AIF</style></keyword><keyword><style  face="normal" font="default" size="100%">MF</style></keyword></keywords><dates><year><style  face="normal" font="default" size="100%">2024</style></year></dates><language><style face="normal" font="default" size="100%">eng</style></language></record></records></xml>