{\rtf1\ansi\deff0\deftab360

{\fonttbl
{\f0\fswiss\fcharset0 Arial}
{\f1\froman\fcharset0 Times New Roman}
{\f2\fswiss\fcharset0 Verdana}
{\f3\froman\fcharset2 Symbol}
}

{\colortbl;
\red0\green0\blue0;
}

{\info
{\author Biblio 7.x}{\operator }{\title Biblio RTF Export}}

\f1\fs24
\paperw11907\paperh16839
\pgncont\pgndec\pgnstarts1\pgnrestart
Silhan L, Arregi JAnder, Plichta T, Vaculik O, Novotny J, ?er\'fd M. Compact vacuum setup for laser induced plasma etching with optical emission spectrum monitoring. Journal of Vacuum Science & Technology B, 43, 034202 (2025).\par \par }